Part · semiconductors

Patterned inertial sensor wafer

Fill anchor openings with structural polysilicon, dope/anneal and pattern proof masses, compliant springs, fixed/moving electrodes and release holes while retaining sacrificial support Discovery hypothesis; acceptance remains open.

Research draftClosure: OpenInventory incomplete

Capability requirements and tolerances

Consumer-specific numerical targets, quantities and acceptance limits remain open or incompletely reviewed. No smartphone-grade suitability is claimed. Distinct capability tiers require their own making route and qualification.

Making steps · draft selected for navigation; not a validated fabrication specification.

Known Parts and Tools

The selected route supplies this page's inventory and the map's dependency links from one record. Further requirements may be missing; review flags do not prove physical suitability.

Requirement	Role	Use	Relationship status
Sensor sacrificial stack wafer	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Deposition equipment	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Silicon deposition precursor stock	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Dielectric precursor stock	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Doping equipment	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Semiconductor dopant stock	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Diffusion furnace	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Interconnect deposition stock	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Exposure equipment	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Reticle/master pattern	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Photoresist	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Photoresist developer	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Etching equipment	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Etch process gases	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Cleaning equipment	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Pure water	Part	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Cleanroom	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Optical instruments	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Regulated power	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Cooling systems	Tool	reused during construction/verification	Cycle-checked; compatibility unknown
Handling assembly	Tool	incorporated or consumed; allocation remains open	Cycle-checked; compatibility unknown
Ventilation	Tool	reused during construction/verification	Cycle-checked; compatibility unknown

Unselected candidate inventories · 1

These records expose known requirements and alternative or blocked hypotheses. They add no manufacturing links or selected discovery depth.

Use a surface-micromachining polysilicon structural-layer hypothesis with sacrificial layers and compatible readout contacts; exact process is not selected from a proprietary recipe

Silicon wafer · part
MEMS fabrication · tool
Exposure equipment · tool
Reticle/master pattern · part
Photoresist · part
Photoresist developer · part
Deposition equipment · tool
Dielectric precursor stock · part
Interconnect deposition stock · part
Etching equipment · tool
Etch process gases · part
Doping equipment · tool
Semiconductor dopant stock · part
Cleaning equipment · tool
Pure water · part
Cleanroom · tool
Optical instruments · tool
Regulated power · tool
Cooling systems · tool
Handling assembly · tool
Ventilation · tool

Complete inventory, selected process and compatible quantitative capability remain open.

Making outline

Fill anchor openings with structural polysilicon, dope/anneal and pattern proof masses, compliant springs, fixed/moving electrodes and release holes while retaining sacrificial support
Build or acquire each explicit earlier physical input; establish independent references and interfaces.
Make trials and accept only against the eventual caller specification; record uncertainty and rejected outputs.

What remains unresolved

Discovery hypothesis only: quantitative demands, full recipe, quantities, losses, compatibility and acceptance remain to be researched.
Full inventory, required quantities, process settings, numerical demand and suitability remain open.
Attached bounded research supports investigation only; the selected inventory, process, quantitative demands and compatibility are not fully source-checked or approved.

Sources and leads

Source scope and research notes determine which claims have been checked. A URL does not establish a complete making route.

Earlier research provenance

proposals/2026-10-08-discovery/electronics/report.md
proposals/2026-10-08-discovery/electronics/frontier-report.md

Bounded research drafts

Read the source scope, known inventory and remaining limitations. These drafts do not approve the complete selected route.

Read mems research (historical note unavailable)

Return to the discovered map

Used by

Items that directly require this item in their selected inventory.

Paths from Smartphone

These routes together include every item that can lead from Smartphone to this item. Repeated path combinations are collapsed; recipes are omitted.

Shortest route: Smartphone → Sensor system → MEMS sensors → Motion sensor → Gyroscope → Gyroscope mechanical die → Patterned inertial sensor wafer

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